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EQUIPMENT DIRECTORY

Process ceramic parts

Find machinery by production stage and the requirements of your line.

Selection considerations

What ceramic parts do in cell equipment

Ceramic parts hold, guide and insulate inside hot cell-process tools. Typical duties are boat supports, rods, insulators and fixtures in diffusion furnaces and in deposition systems, where wafers ride in boats through repeated heating and cooling. They work next to process quartz parts and process graphite parts; the choice between the three materials depends on temperature, chemistry, load and how the part is cleaned. Boats are loaded and unloaded by cell material handling automation, so a support that drifts out of shape can cause transfer faults as well as process problems. Tool temperatures and atmospheres differ between cell routes, and the TOPCon, HJT and back-contact compatibility guide helps you describe the duty a part will face. All of this sits in the cell production stage.

Starting a quote

A ceramic part is a drawing, a grade and a duty cycle. Before you ask for prices, freeze the drawing revision, name the grade or let the maker propose one in writing, and describe the real service: peak temperature, ramp pattern, atmosphere, the load it carries and the cleaning method your maintenance team uses. Ask how the maker controls flatness and straightness after firing and machining, and how parts are packed so edges arrive intact. Agree the lot record that travels with each delivery so a failed part can be traced back to its batch; the traceability guide shows how part lots can sit next to tool maintenance data.

The two listed suppliers

Precision ceramic equipment parts from Ferrotec Jiangdong (Dahe New Material) cover drawing-based ceramic parts for equipment duties. The ceramic family is only the starting point; the grade and the controlled drawing settle the offer. Ask Ferrotec Jiangdong to confirm the producing site, lot records and the operating limits it accepts for your installed part.

The silicon carbide PV boat holder from FLK / Sealmann (Ningbo) is a narrower item: a silicon-carbide support for wafer boats, made to the buyer's drawing for PV and semiconductor tools. Its quote depends on the mating boat and the support layout, so send both interfaces together with your heat and load cycle. Settle deformation limits, cleanliness and cleaning with FLK and with the owner of the tool, and write the agreed values into the purchase order.

Checking the first delivery

Measure critical dimensions on arrival, fit a part into the actual boat or fixture, and run it through several real cycles before you release a larger order, much like the site steps described under equipment acceptance trials. If the part replaces a quartz or graphite item, compare wear and cleaning behaviour against the part it replaces.

Plan the equipment scope

Identify the production step, cell or module format and output unit before comparing equipment. Use the listed source, scope and specifications to prepare a configuration-specific enquiry. Missing values are left unspecified and do not count as exact filter matches.

Read equipment buying guides or prepare a sourcing brief.

2 equipment listings

Clear filters

Silicon carbide PV boat holder

FLK's silicon-carbide boat holder supports wafer boats in PV and semiconductor process tools and is made to the buyer's drawing. The holder page describes stability, thermal-shock resistance and low expansion, with no numerical load, purity, tolerance or temperature figures. Send the mating boat, support and contact surfaces, datums, travel and clearances to get a quote. FLK offers its crystal boat and furnace tube as separate products.

FLK / Sealmann (Ningbo)
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Precision ceramic equipment parts

Ferrotec Jiangdong makes ceramic parts to the buyer's drawing for semiconductor and solar process equipment. The catalogue covers silicon carbide, zirconia, alumina, silicon nitride and aluminium nitride. Picking the family is step one; a usable replacement also needs the grade, the finished geometry and the duty in your tool fixed in the quotation.

Ferrotec Jiangdong (Dahe New Material)
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Exact filters only match published specifications. Listings without that published value are not shown.

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