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Laboratory-format PVD magnetron sputtering

ACME Optoelectronics (Dingneng) ↗

A laboratory PVD magnetron sputtering system for perovskite film trials, rated at no more than 20 minutes for a 100 nm ITO layer.

Sold as a laboratory configuration with no model code. Dingneng's MW and GW catalogue entries are separate machines with figures of their own.

General illustration of cell production equipment, not a photograph of this model. Ask the manufacturer for current photographs and layout drawings of the configuration offered.

START WITH YOUR PRODUCTION TASK

Choose this tool for laboratory film work once your layer and full cycle are defined. Ask Dingneng to confirm in writing which steps the cycle includes and how uniformity is calculated. For any production plan, request the line configuration and its annual capacity as a separate offer.

SOURCE-LINKED DATA

Published specifications

Values below are published by the manufacturer, each with the date its source was checked. Ask for the figures that apply to your configuration and material in the quotation.

Manufacturer catalogue values
ParameterPublished valueSource check
Laboratory substrate format300 × 400 mm; smaller formats described as compatible2026-10-11
Cycle at 100 nm ITO≤20 minutes at 100 nm ITO; cycle boundary unspecified2026-10-11
Within-substrate uniformity<5%; formula and measurement map unspecified2026-10-11
Between-substrate uniformity<5%; sample count and run duration unspecified2026-10-11

See sources and check dates ↓

01 · Manufacturer information

Dingneng lab sputtering figures and the terms to define

Dingneng lab sputtering figures and the terms to define
ItemDingneng valueDefine before ordering
Substrate size300 × 400 mm; smaller sizes acceptedFixture, usable coated area and edge margin
Cycle20 minutes or less at 100 nm ITOWhich of loading, pump-down, stabilisation and unloading count
Uniformity within a substrateBelow 5%Formula, measuring points and edge margin
Uniformity between substratesBelow 5%Number of samples, run length and statistics used

Source: Dingneng laboratory sputtering technical table

02 · Manufacturer information

Where this sputtering tool sits in a perovskite line

This entry covers PVD magnetron sputtering at laboratory size. Thermal evaporation is its own family in the catalogue, so the ITO cycle speaks for sputtered ITO only. Wet-film coating, crystallisation and laser stations are separate machines as well.

Dingneng also lists MW and GW entries. To weigh this tool against a production offer, ask for that offer's substrate layout, station list, transfer sequence and production acceptance terms.

Sources: Dingneng laboratory sputtering technical tableDingneng process-machine catalogueDingneng company process scope

03 · PVYard procurement analysis

Setting up a sputtering trial with Dingneng

  1. Describe your substrate and film

    Give the substrate size, layer stack, target thickness and the electrical or optical properties the film must reach. Add the temperature or damage limits your underlying layers can take, based on your own process.

  2. Fix the timing boundary

    Mark where a cycle starts and ends, and log loading, pump-down, stabilisation and unloading on their own if useful. Run the trial with your real material and thickness, since the 20-minute figure was given for 100 nm ITO.

  3. Fix the measurement plan

    Set the thickness method, measuring points, edge margin, calibration and uniformity formula. Measure the spread between substrates over an agreed run and sample count. Two suppliers quoting below 5% can then be compared on equal terms.

  4. Log the setup and recovery steps

    Record the fixture, installed process options and recipe or control version used. Ask how the tool is safely stopped and restarted, and which checks come before substrates go back in.

04 · PVYard procurement analysis

Moving from the lab tool to production

  • Bigger substrates need fresh data

    Uniformity, handling, utility use and full cycle time have to be shown again on the production machine. Lab results guide development; accepted output for the larger tool comes from its own trial.

  • A line has many stations

    List incoming preparation, each film step, crystallisation, patterning, encapsulation and final inspection for your stack. Agree which stations Dingneng supplies and which stay with you before calling the order turnkey.

05 · PVYard procurement analysis

What to send with a Dingneng sputtering enquiry

  • Substrate and layer

    Size, stack, target or source material and the thickness you need.

  • Metrology

    The film tests you require, your uniformity definition and the sample plan.

  • Cycle and utilities

    A request for the full timing boundary and a utility schedule for this quotation.

  • Acceptance and support

    Trial records, installation site, commissioning scope and service terms for the contract.

06 · PVYard procurement analysis

Dingneng lab sputtering questions

How is the below-5% uniformity calculated?

The table gives no formula or sampling plan. Ask Dingneng to confirm both in writing for your trial.

Does the 20-minute cycle apply to every film?

It is stated for 100 nm ITO on this laboratory tool. Ask for a timed cycle with your own material and thickness.

Can this tool tell me GW line output?

GW output needs a production configuration and full line acceptance terms. Request those as a separate proposal.

TURN THIS INTO A CLEAR REQUEST

Ask about this product

Include the product-specific questions above and replace every bracket with your actual requirement. Save your edited text to your sourcing brief, then review it before submitting an enquiry. Saving a brief does not send it to a manufacturer.

Sources

Manufacturer information and our buying guidance are labelled section by section above. Each source below shows the date it was checked.

Dingneng laboratory sputtering technical table ↗

Source check: 2026-10-11 · Lists 300 × 400 mm and smaller substrates, 20 minutes or less at 100 nm ITO, and uniformity below 5% within and between substrates.

Dingneng process-machine catalogue ↗

Source check: 2026-10-11 · Sputtering and evaporation each appear in laboratory and production sizes.

Dingneng company process scope ↗

Source check: 2026-10-11 · Dingneng's perovskite process range and line engineering work.

Report a correction · How we prepare listings

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