EQUIPMENT SERIES
VORI · Vertical inline PVD system
NAURA ↗The VORI is a vertical inline vacuum-coating line built from modules. It sputters metals, oxides, nitrides and carbides, can add multi-arc sources, and coats one or both sides of the substrate.
NAURA's VORI page serves several industries, and its worked examples come from magnetic materials and glass through-hole coating. For a PV order, settle the solar layer stack and substrate first and quote from there. Cell passivation films come from NAURA's tube PECVD system, so the VORI quote covers the sputtered layers.
General illustration of cell production equipment, not a photograph of this model. Ask the manufacturer for current photographs and layout drawings of the configuration offered.
START WITH YOUR PRODUCTION TASK
Fix your substrate, layer materials and film targets, choose cathodes and transport speed with NAURA, then accept the line on measured uniformity, accepted output and target use over a sustained run.
SOURCE-LINKED DATA
Published specifications
Values below are published by the manufacturer, each with the date its source was checked. Ask for the figures that apply to your configuration and material in the quotation.
The manufacturer has not published a complete specification table for this entry. Request the exact offered drawing and operating limits.
01 · Manufacturer information
Where the VORI fits a PV coating task
NAURA lists DC, RF and medium-frequency sputtering, and a build that pairs magnetron sputtering with multi-arc sources. Width and module count are set per order for development, pilot or production lines, coating one or both faces. The page names no specific PV film stack, substrate thickness or solar-device result, so those targets come from your process.
Two worked examples on the page come from other markets. One shows rotating-target uniformity on a heavy rare-earth film for magnetic materials; the other covers TGV through-hole coating. They show the range of the line. For a solar order, ask NAURA for deposition results on your own layer and substrate.
02 · Manufacturer information
VORI figures from NAURA
| Entry | NAURA figure | To settle for your line |
|---|---|---|
| Transport speed | 30–1000 mm/min | Your recipe, the dwell length it needs, and output that passes inspection. |
| Film uniformity | ±5% | Which film property, the formula, measuring map and load. |
| Planar target utilisation | ≥35% | Target geometry, end-of-life point and calculation. |
| Rotating target utilisation | ≥80% | Cathode, target and process conditions. |
| Substrate width | Configured per order | Width, thickness, carriers and coated area. |
03 · PVYard procurement analysis
What to put in the VORI order
Film and device targets
Layer materials and thicknesses, the optical, electrical and material properties required, and how the finished device will be accepted. For a solar cell line, state where the coating step falls in your cell production sequence.
Substrate handling
Dimensions, thickness, carrier, coated sides, edge exclusion and the handling damage you will reject.
Target use
Cathode type, target material, how utilisation is calculated, when a target is replaced, and how coating lost during service is counted.
Plant interfaces
Vacuum and exhaust, process gas, power and cooling water, cleanliness and service needs for the configuration quoted.
04 · PVYard procurement analysis
Accept the line on your PV layer
Lock the configuration
Approve the substrate and carrier, layer sequence, targets and power-source arrangement.
Map the films
Measure the agreed thickness and property uniformity across the area and over consecutive substrates at your chosen speed.
Check devices and handling
Test the downstream device results that matter to you and inspect substrates for handling damage.
Prove sustained running
Track accepted output, target consumption, cleaning, replacements and stops with traceable process records.
05 · PVYard procurement analysis
VORI buying questions
Is 1000 mm/min the production rate I will get?
It is the top of the transport range. Usable output depends on your recipe, dwell length and how many coatings pass inspection.
Do the TGV and rare-earth examples apply to solar films?
They come from other applications with different acceptance tests. Ask NAURA for deposition data on your PV layer.
Will my line reach 35% and 80% target use?
Those are NAURA's catalogue figures for planar and rotating targets. Agree the target geometry, end point and calculation, then measure them on your configuration.
TURN THIS INTO A CLEAR REQUEST
Ask about this product
Include the product-specific questions above and replace every bracket with your actual requirement. Save your edited text to your sourcing brief, then review it before submitting an enquiry. Saving a brief does not send it to a manufacturer.
Sources
Manufacturer information and our buying guidance are labelled section by section above. Each source below shows the date it was checked.
NAURA Vacuum Tech VORI product page ↗
Source check: 2026-10-11 · Lists sputtering modes, transport speed, film uniformity and target utilisation, with application examples and a line illustration.
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