EQUIPMENT MODEL
HORIS L12 · Tube LPCVD system
NAURA ↗The HORIS L12 deposits oxide and polysilicon layers in a horizontal quartz tube, with separately controlled heating zones and gas fed in at several points along the tube. It suits cell makers building passivating contacts who need doped or undoped poly films.
NAURA presents the L12 for TOPCon, TBC and HTBC cells. Its published figures cover temperature, control accuracy, breakage and vacuum tightness; film thickness maps and quartz life figures come with a quotation.
General illustration of cell production equipment, not a photograph of this model. Ask the manufacturer for current photographs and layout drawings of the configuration offered.
START WITH YOUR PRODUCTION TASK
Before ordering, agree the exact layer, dopant and wafer load, fix the quartz and gas-inlet configuration, and ask NAURA to confirm in writing the film results and quartz life it will demonstrate under your recipe.
SOURCE-LINKED DATA
Published specifications
Values below are published by the manufacturer, each with the date its source was checked. Ask for the figures that apply to your configuration and material in the quotation.
The manufacturer has not published a complete specification table for this entry. Request the exact offered drawing and operating limits.
01 · Manufacturer information
How the L12 spreads gas and heat along the tube
NAURA builds the L12 with independently controlled heating zones, several gas inlet positions and a choice of front or rear flow. The aim is an even deposition from the first wafer in the boat to the last. How well that works depends on the loaded tube, so ask for thickness results measured with a full boat of your wafers.
The named processes are oxide, polysilicon and phosphorus- or boron-doped polysilicon. NAURA also describes stronger quartz, longer consumable life and upgraded wearing parts. Each cell architecture runs its own deposition recipe, so give the supplier the exact stack you plan to make. Doped poly layers usually need a later anneal, and NAURA's horizontal HORIS D12 furnace lists annealing among its processes.
02 · Manufacturer information
HORIS L12 published figures
| Item | NAURA figure | What to agree for your order |
|---|---|---|
| Maximum temperature | 650°C | Your operating recipe and where temperature is measured. |
| Temperature control | ±1°C | Controller accuracy; film uniformity is a separate figure. |
| Wafer breakage | ≤0.01% | Wafer thickness, sample size and which handling steps count. |
| Pressure rise | ≤1 Pa/min | Chamber condition, volume and the leak-test method. |
| Named layers | Oxide and doped/undoped polysilicon | Precursor, dopant and target film properties. |
03 · PVYard procurement analysis
Spell out the quartz and cleaning package
Quartz parts
Get tube, inlet, boat and seal drawings for your load, plus alignment tolerances, the spare parts NAURA supports and any contamination limits.
Film data
Ask for thickness, dopant and sheet-resistance spread across boat positions and over several batches, run on the recipe you agree.
Running cost
Request cleaning and replacement intervals, the downtime each takes, what your own staff may service, and quartz life figures from similar processes.
04 · PVYard procurement analysis
Accepting an L12: deposition and service in one test
Fix the film
Write down precursor, dopant, wafer size, incoming surface and the layer properties you need.
Record the tube setup
Log the inlet, quartz and boat configuration, then run temperature and leak-rate tests on the installed tool.
Map the films
Measure several positions across a full boat over repeated runs, reporting thickness, doping and cell results apart.
Test a quartz change
Include boat loading damage, cleaning, quartz replacement and a restart back to the saved recipe.
05 · PVYard procurement analysis
Questions buyers ask about the HORIS L12
Does ±1°C mean the polysilicon will be uniform?
That figure describes the temperature controller. Film uniformity comes from measuring films grown in a loaded tube, so ask NAURA for those maps.
How many batches does the stronger quartz last?
NAURA describes longer life without a batch count. Ask for a figure tied to a recipe close to yours and put it in the contract.
Can one tube run both phosphorus and boron poly?
Treat them as two processes with their own chemistry, film targets and contamination controls, and have each one specified in writing.
TURN THIS INTO A CLEAR REQUEST
Ask about this product
Include the product-specific questions above and replace every bracket with your actual requirement. Save your edited text to your sourcing brief, then review it before submitting an enquiry. Saving a brief does not send it to a manufacturer.
Sources
Manufacturer information and our buying guidance are labelled section by section above. Each source below shows the date it was checked.
NAURA Vacuum Tech HORIS L12 product page ↗
Source check: 2026-10-11 · Lists the L12 process range, its 650°C and ±1°C figures, breakage and pressure-rise limits, and shows the furnace.
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