EQUIPMENT MODEL
HORIS P12 · Tube PECVD system
NAURA ↗The HORIS P12 deposits cell films in a tube furnace loaded with graphite boats. NAURA lists a long multi-point heating zone, internal cooling, boat management and third-generation electrodes.
Covers the P12 tube PECVD system and the films and TOPCon, TBC and HTBC routes its page names. Film uniformity and long-run yield on your wafers are figures to agree with NAURA.
General illustration of cell production equipment, not a photograph of this model. Ask the manufacturer for current photographs and layout drawings of the configuration offered.
START WITH YOUR PRODUCTION TASK
Order the P12 after NAURA confirms in writing the film stack, wafer, boat and electrode set-up for your line, and trial loads meet your film, electrical, temperature and breakage targets.
SOURCE-LINKED DATA
Published specifications
Values below are published by the manufacturer, each with the date its source was checked. Ask for the figures that apply to your configuration and material in the quotation.
The manufacturer has not published a complete specification table for this entry. Request the exact offered drawing and operating limits.
01 · Manufacturer information
Boats, heating and electrodes on the P12
NAURA describes a long heating zone with multi-point control so graphite boats heat and cool quickly, internal cooling, third-generation electrodes that can be swapped while hot, boat management and automatic film-process adjustment. Ask for the maintenance procedure and measured cycle that go with these features.
Listed processes are silicon nitride, silicon oxide, aluminium oxide, combined stacks, polysilicon, doping and annealing. TOPCon, TBC and HTBC are named as compatible routes. Each layer needs its own gases and settings, so agree the recipe and film results for your stack. Edge-wrapping passivation films can instead come from NAURA's HORIS TA12 tube ALD system, and the HORIS L12 is its LPCVD route for polysilicon layers.
Source: NAURA HORIS P12 product page
02 · Manufacturer information
P12 figures and how to qualify them
| Entry | NAURA value | How to qualify |
|---|---|---|
| Maximum temperature | 650°C | Your operating recipe and load. |
| Temperature control accuracy | ±1°C | Sensor and method; film uniformity is measured separately. |
| Breakage | ≤0.01% | Wafer count, load and trial length. |
| Pressure rise | ≤1 Pa/min | Test volume, conditions and procedure. |
| Material | PV crystalline-silicon cells | Wafer format, thickness and boat. |
Source: NAURA HORIS P12 product page
03 · PVYard procurement analysis
Specify films and boat handling
Cell and films
Architecture, wafer and layer list, the electrical and optical results you need, and thickness and uniformity criteria.
Boats and electrodes
Boat type and load, electrode layout, handling and contamination limits. Ask for the hot-swap procedure and who carries out each step.
Line and site
Gas, vacuum, exhaust, power, cooling and maintenance needs, with sustained output and reject definitions.
Source: NAURA HORIS P12 product page
04 · PVYard procurement analysis
Accept films, cells and handling together
Lock the process
Fix layers, wafer and boat, reactor and electrode set-up, and who owns gases and recipe.
Check the tube
Pass the agreed temperature and pressure-rise tests by stated methods before moving on to film tests.
Measure films and cells
Map thickness and properties, test cells and count broken or damaged wafers over an agreed population.
Run the full cycle
Include loading, heating, cooling, deposition and servicing. Have NAURA show fault recovery and log every recipe change.
Source: NAURA HORIS P12 product page
05 · PVYard procurement analysis
HORIS P12 buyer questions
Does ±1°C mean uniform films?
It describes temperature control. Measure film thickness and properties across the load to judge uniformity.
Will I see ≤0.01% breakage on my wafers?
NAURA leaves out the load, thickness and counting method. Write those into the trial.
May my staff change electrodes hot?
Only under NAURA's controlled service and safety procedure for your configuration. Request it with the order.
Source: NAURA HORIS P12 product page
TURN THIS INTO A CLEAR REQUEST
Ask about this product
Include the product-specific questions above and replace every bracket with your actual requirement. Save your edited text to your sourcing brief, then review it before submitting an enquiry. Saving a brief does not send it to a manufacturer.
Sources
Manufacturer information and our buying guidance are labelled section by section above. Each source below shows the date it was checked.
NAURA HORIS P12 product page ↗
Source check: 2026-10-11 · Reactor features, film list, temperature, breakage and pressure-rise figures, shown with a family illustration.
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