EQUIPMENT MODEL
HORIS D12 · Horizontal photovoltaic diffusion furnace
NAURA ↗The HORIS D12 is a multi-zone horizontal furnace that handles several hot steps of cell making in one tool family: doping with phosphorus or boron, growing oxide and annealing. It delivers dopant source through several inlets and collects waste automatically.
NAURA lists low-pressure and atmospheric operation, wet oxidation and hydrogen annealing for the D12. Each of these is its own process, and the operating recipe and safety procedures come from NAURA with the order.
General illustration of cell production equipment, not a photograph of this model. Ask the manufacturer for current photographs and layout drawings of the configuration offered.
START WITH YOUR PRODUCTION TASK
Choose the diffusion, oxidation or annealing task and the source-handling setup first, then accept the D12 on processed wafers, with NAURA's utilities, waste collection and restart duties written into the order.
SOURCE-LINKED DATA
Published specifications
Values below are published by the manufacturer, each with the date its source was checked. Ask for the figures that apply to your configuration and material in the quotation.
The manufacturer has not published a complete specification table for this entry. Request the exact offered drawing and operating limits.
01 · Manufacturer information
Doping, oxidation and annealing are separate jobs
NAURA names low-pressure phosphorus and boron diffusion, annealing and oxidation, atmospheric annealing and oxidation, and hydrogen annealing for the D12. It feeds dopant through multiple inlets, heats in several zones and uses pressure to control source delivery. Each route has its own recipe and chemicals, so specify the one you are buying for. For the same doping steps in an upright tube with a smaller footprint, NAURA offers the VERIS vertical furnace.
The feature list adds wet oxidation, high-temperature sealing, automatic source top-up, larger filters and automatic waste collection. Collection capacity, chemical make-up, exhaust and abatement needs and the handling procedure come from NAURA for your project. Ask for them as part of the quotation and plan your site services around them.
02 · Manufacturer information
HORIS D12 published figures
| Item | NAURA figure | What your order should define |
|---|---|---|
| Maximum temperature | 1030°C | The diffusion, oxidation or anneal recipe you will run. |
| Temperature control | ±1°C | How and with what load it is measured. |
| Breakage | ≤0.01% | Your wafer, sample size and handling steps covered. |
| Pressure rise | ≤2 mbar/min | Test procedure, keeping the stated unit. |
| Source handling | Automatic replenishment and collection | Chemistry, capacity and the interfaces NAURA supplies. |
03 · PVYard procurement analysis
Put source and waste duties in the order
Process
State the doping, oxidation or anneal route, the incoming wafer condition and the electrical or material results you will measure. Where an oxide is followed by a doped polysilicon layer, that deposition runs on NAURA's HORIS L12 tube LPCVD system.
Dopant supply
Ask for the inlet and source layout, top-up controls, monitoring and the service procedures NAURA approves.
Waste and site
Get filter and collection scope, exhaust and abatement needs, utilities, interlocks and who does what on site for your chemistry.
04 · PVYard procurement analysis
Accepting a D12 on finished wafers
Pick one route
Fix chemistry, recipe ownership and load for the first process; qualify any other route on its own.
Check the tool
Measure temperature control and leak rate with agreed procedures, reporting in the units NAURA quotes.
Check the wafers
Measure doping or oxide and anneal results across boat positions and repeated loads, and log any damage.
Rehearse a stop
Have NAURA show a source top-up, filter and waste service, a fault and a safe restart.
05 · PVYard procurement analysis
Questions buyers ask about the HORIS D12
Does 1030°C cover every D12 recipe?
It is the furnace limit. Each named operation still needs its own process conditions and acceptance test.
Does automatic waste collection meet our site rules?
That depends on your local requirements. Ask NAURA for the collection and abatement design for your project and check it with your EHS team.
Where do hydrogen annealing settings come from?
NAURA supplies the operating recipe and safety procedure with the order. Request them before installation planning starts.
TURN THIS INTO A CLEAR REQUEST
Ask about this product
Include the product-specific questions above and replace every bracket with your actual requirement. Save your edited text to your sourcing brief, then review it before submitting an enquiry. Saving a brief does not send it to a manufacturer.
Sources
Manufacturer information and our buying guidance are labelled section by section above. Each source below shows the date it was checked.
NAURA Vacuum Tech HORIS D12 product page ↗
Source check: 2026-10-11 · Names the D12 diffusion, oxidation and annealing routes, source replenishment and waste collection features, and its temperature and leak figures.
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