NAURA
北方华创科技集团股份有限公司
NAURA's Vacuum Tech subsidiary in Beijing sells nine photovoltaic tools, from the SGM 4101 crystal puller to tube ALD, PECVD, diffusion, inline PVD and carbon-component furnaces. Pick the tool by the material result you need, then ask which group company builds and ships it.
Supplier at a glance
- Location
- Beijing, Beijing
- Equipment listed here
- Graphite purification equipment · Component coating furnaces · Crystal growth furnaces · Diffusion furnaces · Deposition systems
- Company
- 北方华创科技集团股份有限公司, trading as NAURA; older records use a Sevenstar-linked English name. [1]
- PV sales unit
- Vacuum Tech subsidiary on Jiuxianqiao East Road, Beijing, listed on its own in the group directory. [2]
- PV range
- Nine models for silicon growth, cell deposition and diffusion, inline PVD and carbon-part processing. [3]
- Annual report
- The 2025 report covers the vacuum and new-energy business and the group's subsidiaries. [4]
- Profile sources
- 13 named sources; source list
Company scope
What the company makes
NAURA is the current brand of 北方华创科技集团股份有限公司, a Beijing group listed in 2010 under stock code 002371. Its corporate page dates the company to September 2001, a business integration to 2016 and the NAURA name to 2017. Older company records carry an English name linked to Sevenstar, so expect it on some legacy documents. The group works in semiconductor equipment, vacuum and new-energy equipment and precision components. Only the photovoltaic tools matter here.
Photovoltaic sales run through 北京北方华创真空技术有限公司, known as Vacuum Tech. The group contact directory lists it apart from the microelectronics and precision-component businesses and places it on Jiuxianqiao East Road in Beijing. Its consultation page names a dedicated sales centre. Because the group has several subsidiaries, ask which one builds your model and where factory acceptance will happen.
The PV catalogue has nine entries, each for a different production step. SGM 4101 pulls Czochralski monocrystalline silicon. HORIS TA12, P12 and L12 are tube ALD, PECVD and LPCVD systems for cell films. VERIS is a vertical diffusion furnace and HORIS D12 a horizontal one. VORI is a vertical inline PVD line. CONAL VH treats graphite and felt, and VERAL GH coats graphite parts and substrates. Those two feed upstream component supply and are separate from cell passivation.
The model pages give useful numbers, and each one measures a different thing. A growth temperature or hot-zone size describes the furnace, while ingot oxygen, carbon and defect levels come out of your own growth trials. Temperature-control accuracy on a deposition tube sits apart from film uniformity. Sheet-resistance spread after diffusion is measured on processed wafers, whatever the pressure-rise limit says. TOPCon, TBC and HTBC are named as cell architectures, so the recipe for your stack belongs in the order.
A few catalogue entries disagree with themselves. CONAL VH gives 2400°C in its text and 1900°C in its table, and its English graphitization heading differs from the Chinese purification wording. The TA12 page mixes evaporation and perovskite wording into a tube-ALD description and places a percentage beside the edge width without saying what it measures. VERAL GH has garbled solid-feed text. For any of these models, ask Vacuum Tech for the current controlled specification.
Some performance comparisons come without a stated baseline. VERIS claims 50% more single-tube output than a horizontal system, TA12 claims lower special-gas use, and VORI cites magnetic-material and TGV examples from outside photovoltaics. Ask for the compared load and process behind each figure, and judge output on trials with your own wafers or parts.
The 2025 annual report on the issuer-disclosure site describes the group's vacuum and new-energy business and its subsidiaries. Corporate pages also give counts of sites and development bases with different scopes. Keep those counts apart when you size the group, and ask for the factory that will build your tool.
A useful quotation starts from the physical result: grown silicon, a coated or diffused wafer, purified graphite or felt, or a coated part. Send that target with your incoming material, then ask for the model, delivered configuration, availability, producing entity and FAT location. Settle utilities, consumables, cleaning, abnormal-operation handling, recipe ownership and service scope before you order.
Equipment portfolio
Start with the actual equipment
The entries below cover selected products and series from this manufacturer. Ask for the full catalogue if your project needs other models.
Continuous graphite purification furnace →
The CONAL VH is a continuous high-temperature furnace from NAURA for purifying graphite structural parts and graphite felt used inside semiconductor and solar equipment. Its working zone is 600 × 600 × 600 mm. The page gives two maximum temperatures, 2400°C in… [11]
Specifications & selection questions →CVD component coating furnace →
NAURA's VERAL GH is a CVD furnace that lays a semiconductor-grade silicon-carbide coating on graphite parts and SiC substrates. The product page lists a 1600°C maximum temperature, ±10°C uniformity and a 10 Pa cold ultimate vacuum, with liquid and solid feed arrangements.… [12]
Specifications & selection questions →Czochralski silicon growth furnace →
The NAURA SGM 4101 is a Czochralski furnace for pulling photovoltaic monocrystalline silicon. NAURA lists 10–16 inch ingots, P- and N-type growth, a 1500–1600°C working range, ≤2 Pa vacuum and a 36–42 inch hot zone, with a magnetic-field option. Quote it with… [5]
Specifications & selection questions →Horizontal photovoltaic diffusion furnace →
The HORIS D12 is NAURA's horizontal furnace for diffusion, oxidation and annealing in solar cell lines. It runs low-pressure phosphorus or boron diffusion, atmospheric oxidation and annealing, wet oxidation and hydrogen annealing. NAURA lists 1030°C maximum, ±1°C control, ≤0.01% breakage and ≤2… [10]
Specifications & selection questions →Tube ALD passivation system →
The NAURA HORIS TA12 is a tube ALD system for surface and edge passivation of TOPCon and TBC solar cells. NAURA lists ≤3% surface uniformity, ≤1 mm edge wrap, single- or double-wafer loading for full and half cells, and a claimed 30%… [6]
Specifications & selection questions →Tube LPCVD system →
The HORIS L12 is NAURA's horizontal tube LPCVD system for depositing oxide and polysilicon, including phosphorus- and boron-doped polysilicon, on TOPCon, TBC and HTBC cell lines. NAURA lists a 650°C maximum, ±1°C temperature control, wafer breakage of ≤0.01% and a pressure rise… [8]
Specifications & selection questions →Tube PECVD system →
The NAURA HORIS P12 is a tube PECVD system for crystalline-silicon solar cells, listed at 650°C maximum with ±1°C control, ≤0.01% breakage and ≤1 Pa/min pressure rise. It uses graphite boats, multi-point heating and electrodes that can be changed hot. Quote it… [7]
Specifications & selection questions →Vertical inline PVD system →
NAURA's VORI is a modular vertical inline PVD line for sputtering, with optional multi-arc sources, offered for photovoltaic and other coating work. The page lists 30–1000 mm/min transport, ±5% film uniformity and target utilisation of ≥35% for planar and ≥80% for rotating… [13]
Specifications & selection questions →Vertical photovoltaic diffusion furnace →
VERIS is NAURA's vertical diffusion furnace for boron and phosphorus doping and annealing on TOPCon, TBC and HTBC cells. NAURA lists 1030°C maximum, ±1°C control, ≤0.01% breakage and ≤2 mbar/min pressure rise, and says one tube outputs 50% more than a horizontal… [9]
Specifications & selection questions →Which tool for which step
NAURA PV tools by production step
Grow silicon
SGM 4101 pulls monocrystalline silicon from polysilicon feed in a Czochralski hot zone. Tell NAURA the ingot size, electrical and material quality and defect limits you need. [3]
Deposit and diffuse on cell wafers
Tube ALD, PECVD and LPCVD lay down films, and the VERIS and HORIS D12 furnaces handle doping. Each needs its own layer or dopant target, wafer load and measured distribution. [3]
Coat substrates inline
VORI offers transport and cathode options. Give it your PV layer stack and coated-substrate acceptance criteria; its magnetic-material and TGV examples come from other industries. [3]
Prepare carbon parts
CONAL VH cleans impurities out of graphite and felt; VERAL GH puts coatings on graphite components. Specify impurity or coating targets and the component properties that must survive the process. [3]
Catalogue entries to clarify
Three NAURA product pages with conflicting entries
CONAL VH temperature and naming
The text says 2400°C and the table says 1900°C. The English heading calls it graphitization while the Chinese text describes purification. Ask for the current controlled specification and the process it covers. [11]
TA12 process and edge figures
Evaporation and perovskite wording appears on a tube-ALD page, and a percentage sits next to the edge width with no definition. Ask which film is offered, the edge width limit and how it is measured. [6]
VERAL GH coating chemistry
The solid-feed text is garbled, so any TaC process it may describe is unclear. Ask which chemistries are supported and what coating result NAURA will commit to. [12]
Who builds, ships and supports
Name the producing company and the tested configuration
Contracting and producing entity
Match the parent company name, then ask which subsidiary manufactures, delivers, runs FAT and services your tool. The annual report describes the group as a whole, so the order should name this company on its own. [2][4]
Configuration package
Request current availability, the delivered configuration and revision-controlled specifications. Tie recipes, utilities and consumables to that configuration. [3]
Measured trials
Run loaded tests on your own materials with agreed result definitions. Compare output, consumables and energy only against a stated baseline. [3]
Project fit
Match the offering to your project
Cell and wafer plants choosing growth, film, diffusion or inline PVD tools from one Chinese group.
Upstream suppliers that purify graphite and felt or coat graphite components.
Buyers who will run material trials and want the producing subsidiary named in the contract.
Confirm before ordering
- Which subsidiary produces each tool, signs the contract and hosts FAT.
- The correct CONAL VH maximum temperature, the TA12 film and edge definitions, and the VERAL GH chemistry.
- Output, consumption and performance figures for your load, written into the order, since the catalogue gives no capacity or test report.
Written from NAURA's corporate site, PV catalogue and 2025 annual report as of 2026-10-11; ask Vacuum Tech which subsidiary builds your tool.
Certificates & approvals
Approvals on file
No factory audit or equipment certificate is on file for this manufacturer yet. Ask for current certificates, with their scope and validity, in your quotation request.
Prepare before contacting
Your Continuous graphite purification furnace enquiry checklist
Tick the questions that apply to your project, then take them into your sourcing request. Ticking an item here does not contact the manufacturer.
Your selections remain on this page and are cleared on reload. Download or print to keep a copy. No checklist selections are uploaded.
Continue to sourcing requestRelated procurement notes
Cell technology compatibility: TOPCon, HJT, back-contact and perovskite claims
Buyer questions
Which NAURA company builds the PV tools?
The contact directory lists Vacuum Tech apart from the other subsidiaries. Ask NAURA to name the producing company, FAT site and contracting party for your model. [2]
What does the 2025 annual report tell a buyer?
It describes the group's business lines and subsidiaries, including vacuum and new-energy equipment. Machine performance, capacity and certification have to come from model documents attached to your quotation. [4]
Which CONAL VH temperature applies?
The page lists both 2400°C and 1900°C. Ask NAURA to state the guaranteed maximum in the controlled specification. [11]
Does a TOPCon or TBC mention come with a recipe?
The catalogue names architectures only. Agree the film or dopant, wafer load, recipe ownership and acceptance measurements in the order. [3]
Sources
Where this information comes from
All nine NAURA PV models covered; CONAL VH, TA12 and VERAL GH carry entries to clarify in the quotation.
Company facts come from the publications listed below, each with the date it was checked. The project-fit notes and enquiry checklist are our buying guidance.
- NAURA corporate introduction ↗Manufacturer page · Checked Checked 2026-10-11
Company history, brand names and business lines.
- NAURA group contact directory ↗Manufacturer page · Checked Checked 2026-10-11
Subsidiary list, Vacuum Tech address and sales contact route.
- NAURA photovoltaic equipment catalogue ↗Manufacturer page · Checked Checked 2026-10-11
The nine PV models and the production step each serves.
- NAURA 2025 annual report ↗Issuer annual report · Checked Checked 2026-10-11
Group business segments and subsidiaries.
- SGM 4101 crystal growth furnace page ↗Manufacturer product page · Checked Checked 2026-10-11
Growth temperature, vacuum and hot-zone figures.
- HORIS TA12 tube ALD page ↗Manufacturer product page · Checked Checked 2026-10-11
Passivation uniformity, edge wrap and gas-use figures.
- HORIS P12 tube PECVD page ↗Manufacturer product page · Checked Checked 2026-10-11
Temperature, breakage and pressure-rise figures.
- NAURA PV model page ↗Manufacturer product page · Checked Checked 2026-10-11
Specifications for one model in the PV range.
- NAURA PV model page ↗Manufacturer product page · Checked Checked 2026-10-11
Product sheet for another catalogue tool.
- NAURA PV model page ↗Manufacturer product page · Checked Checked 2026-10-11
Technical entries for a further PV model.
- CONAL VH graphite and felt furnace page ↗Manufacturer product page · Checked Checked 2026-10-11
Purification route and the two maximum-temperature entries.
- VERAL GH component coating page ↗Manufacturer product page · Checked Checked 2026-10-11
Coating route and solid-feed wording.
- NAURA PV model page ↗Manufacturer product page · Checked Checked 2026-10-11
Figures for one more tool in the catalogue.
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