EQUIPMENT SERIES
Tube plasma polysilicon deposition furnace
Shenzhen S.C New Energy Technology Corporation ↗This furnace from S.C New Energy runs tunnel oxide, intrinsic polysilicon and doped polysilicon in the same tube. The company highlights controlled doping and reduced wraparound deposition. It sells the furnace as a process family, so the model and production schedule are set per quotation. It serves the passivating-contact step of TOPCon cell production.
Process family. Wafer format, batch capacity and quartz-tube life are stated in the configured quotation.
General illustration of cell production equipment, not a photograph of this model. Ask the manufacturer for current photographs and layout drawings of the configuration offered.
START WITH YOUR PRODUCTION TASK
Run the three-layer process on your own wafers and fix where the furnace hands over to downstream steps. Ask S.C New Energy to confirm in writing that your target film properties are met in that trial before you order.
SOURCE-LINKED DATA
Published specifications
Values below are published by the manufacturer, each with the date its source was checked. Ask for the figures that apply to your configuration and material in the quotation.
| Parameter | Published value | Source check |
|---|---|---|
| Process integration | Tunnel oxide, i-poly and D-poly in one tube | 2026-09-26 |
| Furnace design | Non-hot-wall design | 2026-09-26 |
01 · PVYard procurement analysis
The three steps inside one tube
S.C New Energy runs all three operations in one tube. For each, set the target you will accept the furnace against. The same layer stack can also be built in other deposition systems, so compare offers on identical targets.
Tunnel oxide
Name the target layer and the measurement that accepts it on your agreed wafers.
Intrinsic polysilicon
State the film you need and its role in your cell before a recipe or batch size is quoted.
Doped polysilicon
Give your doping requirement and the data your process team needs to sign off the output.
02 · PVYard procurement analysis
Published features and what to ask
| Feature | Question for S.C New Energy | What to request |
|---|---|---|
| Same-tube processing | Which steps and wafer transfers are included? | The offered sequence and the full cycle boundary. |
| Controlled doping | Which target and measurement fit our process? | Results for the quoted recipe, with wafer sampling positions. |
| Reduced wraparound deposition | How is wraparound defined and checked? | The inspection method and who removes it downstream. |
| Non-hot-wall design and tube life | Which tube and service conditions are proposed? | Tube material, maintenance and replacement criteria for this set-up. |
03 · PVYard procurement analysis
Accepting the furnace batch by batch
Base acceptance on a representative batch with a defined incoming wafer condition and fixed measurement positions. Ask for layer results across that batch, with rejects and excluded wafers listed. The final wafer count, cleaning interval and accepted shift output come from that trial and the quoted configuration.
For installation, request process, gas, exhaust and utility documents for the configured furnace and name the integrator in charge. Plan maintenance from the operating and maintenance manuals supplied with the furnace. If S.C New Energy proposes additional doping elements, check them against your own process specification.
04 · PVYard procurement analysis
What to send with your furnace enquiry
Wafers and target stack
Wafer format and thickness, the layers you need and the measurement method for each.
Batch and hardware
Tube layout, carriers, batch loading and the full process scope.
Quality and downstream
Doping, uniformity and wraparound checks, and who handles removal downstream.
Documents at delivery
Utility data, recipe and data records, operating limits and maintenance instructions for this configuration, confirmed in writing.
TURN THIS INTO A CLEAR REQUEST
Ask about this product
Include the product-specific questions above and replace every bracket with your actual requirement. Save your edited text to your sourcing brief, then review it before submitting an enquiry. Saving a brief does not send it to a manufacturer.
Sources
Manufacturer information and our buying guidance are labelled section by section above. Each source below shows the date it was checked.
S.C New Energy tube plasma furnace page ↗
Source check: 2026-10-11 · Same-tube process and the furnace's technical features.
Compare equipment for a related task
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