PV MANUFACTURING EQUIPMENT
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EQUIPMENT DIRECTORY

Solar cell manufacturing equipment

Texturing, deposition, metallization and cell processing.

Selection considerations

Follow the cell process in order

Cell production turns a cut wafer into a working cell, and the listings here follow that sequence: texturing, diffusion, deposition, laser steps and metallization. Name the cell route first, because the same step is configured differently for TOPCon, HJT and back-contact cells; the cell technology compatibility guide sets out what changes between them.

Process tools

For wet processing, compare the Robotechnik ET-V8000/15000 with Ideal Energy's wet processing on wafer size, batch or inline layout and chemistry handling. Thermal and vacuum steps are led by NAURA, including the HORIS D12 diffusion furnace and the HORIS P12 PECVD. Laser doping and laser scribing appear as separate classes, with DR Laser among the listed makers. Ask for process results on your own wafers before comparing speed.

Boats, tubes and paste materials

Furnace consumables matter as much as the furnace. Process quartz parts such as Futong's diffusion quartz boat, graphite boats and ceramic holders should be matched to the tube model, wafer pitch and cleaning cycle. On the metallization side, the Maxwell line and the silver powder feedstock from Jingxin are listed.

Moving cells between tools

Cell material handling, for example Guozi's logistics equipment, links the tools. Agree carrier formats and data hand-off early; the traceability and MES guide explains what to ask. Finished cells go on to module assembly.

Plan the equipment scope

Identify the intended cell architecture and the process step before comparing a cell production machine. Ask the manufacturer to confirm suitability when your cell route differs from the one the line was built for. State wafer size, input condition, required process result and the upstream and downstream interfaces. Request the relevant model specification and agree on samples, measurement methods and operating conditions for acceptance. Integrated logistics should also identify carriers, buffers and the handover to each station.

Read equipment buying guides or prepare a sourcing brief.

28 equipment listings

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Vertical inline PVD system

NAURA's VORI is a modular vertical inline PVD line for sputtering, with optional multi-arc sources, offered for photovoltaic and other coating work. The page lists 30–1000 mm/min transport, ±5% film uniformity and target utilisation of ≥35% for planar and ≥80% for rotating targets. Quote it against your substrate, layer stack and film targets.

NAURA
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Horizontal photovoltaic diffusion furnace

The HORIS D12 is NAURA's horizontal furnace for diffusion, oxidation and annealing in solar cell lines. It runs low-pressure phosphorus or boron diffusion, atmospheric oxidation and annealing, wet oxidation and hydrogen annealing. NAURA lists 1030°C maximum, ±1°C control, ≤0.01% breakage and ≤2 mbar/min. Quote one process route and its source and waste handling.

NAURA
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Vertical photovoltaic diffusion furnace

VERIS is NAURA's vertical diffusion furnace for boron and phosphorus doping and annealing on TOPCon, TBC and HTBC cells. NAURA lists 1030°C maximum, ±1°C control, ≤0.01% breakage and ≤2 mbar/min pressure rise, and says one tube outputs 50% more than a horizontal furnace in less floor space. Ask what that comparison is based on.

NAURA
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Tube LPCVD system

The HORIS L12 is NAURA's horizontal tube LPCVD system for depositing oxide and polysilicon, including phosphorus- and boron-doped polysilicon, on TOPCon, TBC and HTBC cell lines. NAURA lists a 650°C maximum, ±1°C temperature control, wafer breakage of ≤0.01% and a pressure rise of ≤1 Pa/min. Quote it against your own layer, dopant, wafer load and quartz package.

NAURA
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Tube PECVD system

The NAURA HORIS P12 is a tube PECVD system for crystalline-silicon solar cells, listed at 650°C maximum with ±1°C control, ≤0.01% breakage and ≤1 Pa/min pressure rise. It uses graphite boats, multi-point heating and electrodes that can be changed hot. Quote it with your film stack, wafer and boat details.

NAURA
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Tube ALD passivation system

The NAURA HORIS TA12 is a tube ALD system for surface and edge passivation of TOPCon and TBC solar cells. NAURA lists ≤3% surface uniformity, ≤1 mm edge wrap, single- or double-wafer loading for full and half cells, and a claimed 30% cut in special-gas use. Send your film, wafer and edge targets for a quote.

NAURA
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Ideal Energy PV wafer wet-process family

Ideal Energy's PV wet-process line handles 182R–210R wafers with a customisable number, layout and function of tanks. Acid and alkaline regions are hard-separated, robots move wafers between them, circulation runs on a variable-frequency drive and alkaline exhaust ducts have hot-water cleaning. Quote it with your chemistry, wafer drawing and surface target.

Ideal Energy (Shanghai) Sunflower
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Exact filters only match published specifications. Listings without that published value are not shown.

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